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为了实现对快速运动目标的跟踪成像或记录其快速变化的过程,研制了一种高帧频64×64元蓝光响应增强CCD。该器件的存储区采用漏斗形结构以提高其工作频率,光敏元采用多蓝光窗口来提高其蓝光响应,衬底采用较高的电阻率50Ω·cm从而提高了其红光响应,采用MPP技术来降低暗电流。器件的帧频为2 000f/s,在450~900nm波长范围的平均量子效率为45%,动态范围达到15 000∶1,暗电流为30pA/cm~2。
In order to track the fast moving target or record its fast changing process, a high frame-rate 64 × 64-element blue response enhancement CCD was developed. The device uses a funnel-shaped memory structure to improve its operating frequency, the photosensor uses multiple blue light windows to improve its blue response, the substrate uses a higher resistivity of 50Ω · cm to improve its red response, the use of MPP technology Reduce dark current. The device has a frame rate of 2 000 f / s, an average quantum efficiency of 45% in the wavelength range of 450-900 nm, a dynamic range of 15 000: 1 and a dark current of 30 pA / cm 2.