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介绍由弗里曼离子源在惰性气体辅助下产生Ca+、He+离子的研究及其分别注入钛膜与纳米膜的微结构分析。Ca+注入Ti膜样品的XPX分析表明 :在 1× 10 18注入剂量下 ,Ca的含量达 33% ,注入Ca在钛表面主要形成CaTiO3、CaO和TiO2 的化学结合的方式与钛基体连接 ;He+注入纳米钛样品的XRD的衍射谱在 15°—4 0°范围内明显分裂及变得较为尖锐 ,由谢乐公式计算出XTA0 5 - 4的纳米膜的平均晶粒粒度已增大为190nm ,证明纳米膜内层晶粒度确有一定长大。而AFM在微米视场下观察到纳米钛膜的表层粒子粒度虽有所长大 ,但在纳米视场却观察到大量的亚结构 ,表明在高剂量注入下 ,存在纳米钛膜表层粒子同时又被碎化成微晶的重要现象。
In this paper, the research on Ca + and He + ions generated by Freeman ion source assisted by inert gas and the microstructure analysis of titanium film and nanofilm respectively are introduced. The results of XPX analysis showed that the content of Ca was 33% at the dose of 1 × 10 18, and CaTiO 3 was mainly formed on the surface of titanium by the chemical combination of CaO and TiO 2. The He + implantation The XRD diffraction spectrum of the nano-titanium samples obviously splits and becomes sharp in the range of 15 ° -4 0 °. The average grain size of the nano-film of XTA0 5 - 4 has been increased to 190 nm by the Scherrer formula, which proves Nano-film grain size does have some growth. The AFM observed in the micro-field under the nano-titanium film surface particle size has grown, but in the nano-field has observed a large number of substructures, indicating that the high-dose implantation, the presence of nano-titanium film surface particles at the same time Crushed into microcrystalline important phenomenon.