利用X射线光电子谱和原子力显微镜研究经气相和溶液钝化的InP表面的化学健合、表面残余氧含量、表面刻蚀效应和粗糙度。结果表明 ,采用气相多硫化物钝化可以获得均匀、光滑和可重复的表面质量 ,但其热稳定性不如溶液多硫化物钝化的InP表面好 X-ray photoelectron spectroscopy (AFM) and atomic force microscopy (AFM) were used to study the chemical binding, surface residual oxygen content, surface etching effect and roughness of InP surface by vapor phase and solution passivation. The results show that the gas-phase polysulfide passivation can be uniform, smooth and repeatable surface quality, but its thermal stability is not as good as the solution polysulfide passivated InP surface is good