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一、前言 微电子学是当代信息科学的重要组成部分。它的发展趋势是集成度不断提高,而单个元件的成本不断下降。超大规模集成电路(VLSI)是集成电路发展的新阶段,它给计算机和电子工业带来了革命性的变化。表1列出了半导体存储器的集成度的变化。可以看出,集成度低的存储器要为集成度高的所取代,因此VLSI的产品的比例要快步地增大。虽然,对超大规模的划分有不同的见解,但256K随机存取存储器(RAM)却公
I. Introduction Microelectronics is an important part of contemporary information science. Its development trend is the continuous improvement of integration, and the cost of individual components is declining. VLSI (VLSI) is a new phase in the development of integrated circuits that has brought revolutionary changes to the computer and electronics industries. Table 1 lists the changes in the integration of semiconductor memory. It can be seen, low integration of memory to be highly integrated replaced, so the proportion of VLSI products to increase rapidly. Although there are different opinions on the large-scale partition, 256K random access memory (RAM)