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概述了抛光α-Al2O3单晶的意义、介绍了用锡盘抛光α-Al2O3单晶的实验装置、描述了抛光实验过程、研究了抛光时间和抛光液酸碱度对工件表面粗糙度的影响。通过改变抛光时间及抛光液pH值,可使α-Al2O3单晶工件表面粗糙度优于0.4nmrms。
The significance of polishing α-Al2O3 single crystal is summarized. An experimental apparatus for polishing α-Al2O3 single crystal with tin plate is introduced. The experimental process of polishing is described, and the influence of polishing time and acidity and alkalinity of polishing solution on the surface roughness of the workpiece is studied. By changing the polishing time and polishing solution pH, α-Al2O3 single crystal workpiece surface roughness better than 0.4nmrms.