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无论是离子注入机还是具有不同高电位差的各种形式装备,对于高压端的信号参数的测量和工况控制往往是必不可少的。其方法有许多种,采用光电信号变换,光导纤维高压隔离,多路信号传输的遥控遥测原理能适应测量对象繁多,控制工况复杂的各种设备。我们为强流离子注入机所研制的具有高压隔离功能的检测控制系统就是采用上述原理试制成功的,该系统解决了大于600kV高压隔离性能,具有信号传输通道多、测量精度高、稳定性好、运行连续可靠、抗干扰性能强等优点。
Whether it is an ion implanter or a wide range of equipment with different high potential differences, it is often necessary to measure and control the condition of the signal at the high voltage end. There are many kinds of methods. The telemetry principle of photoelectric signal conversion, optical fiber high-voltage isolation and multi-channel signal transmission can adapt to a variety of devices with various measurement objects and complicated control conditions. We developed a strong ion implantation machine with high voltage isolation detection control system is the use of the above principle trial success, the system to solve the high voltage isolation of more than 600kV, with many signal transmission channels, high accuracy, good stability, Continuous and reliable operation, anti-jamming performance and so on.