论文部分内容阅读
介绍了等离子体增强磁控溅射离子镀（ＰＥＭＳＩＰ）ＴｉＮ涂层的工艺、组织结构和性能．研究了氮分压和靶功率对涂层相组成和性能的影响，讨论了Ｔｉ２Ｎ对涂层硬度的影响．实验结果表明，由Ｔｉ２Ｎ和Ｔｉｎ两相组成的涂层硬度高，显著提高刀具耐用度．
The process, microstructure and properties of plasma enhanced magnetron sputtering ion plating (PEMSIP) TiN coating are introduced. The effect of nitrogen partial pressure and target power on the phase composition and properties of the coating was studied. The effect of Ti2N on the hardness of the coating was also discussed. The experimental results show that the coating composed of Ti2N and Tin phases has high hardness and significantly improves tool durability.