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设计了一种新型TiW膜自加热结构,产生沿金属化条长方向的温度梯度。文中采用独立的实验和测温金属条结构,利用电阻与温度间的线性关系精确测定金属条上的温度分布,用电阻测温法直接确定电迁徙失效在金属化条上的分布,SEM分析与测试结果一致。不同温度梯度和无温度梯度条件下的实验结果表明,逆向温度梯度能显著提高金属化电徙动失效时间,这可以从温度梯度驱动的热扩散离子流作用得到解释。理论分析和实验结果表明,逆向温度梯度能将金属化电徙动空洞失效位置“推向”阳极,在逆向温度梯度作用下,首次发现了电徙动电阻变化的“新平衡现象”。
A novel TiW self-heating structure was designed to produce a temperature gradient along the length of the metalized strip. In this paper, an independent experimental and temperature-measuring metal strip structure is used, the temperature distribution on the metal strip is accurately measured by the linear relationship between resistance and temperature, and the distribution of electromigration failure on the metal strip is directly determined by resistance temperature measurement. SEM analysis and The test results are consistent. The experimental results under different temperature gradients and without temperature gradient show that reverse temperature gradient can significantly increase the metal migration time, which can be explained by the temperature gradient driven thermal diffusion ion current. The theoretical analysis and experimental results show that reverse temperature gradient can “push” the failed location of the metalized migrating cavity to the anode. Under the action of the reverse temperature gradient, the “new balance phenomenon” of the change of the electrical migration resistance is first discovered.