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作者利用入射速度为40m/s的80~#和100~#白刚玉砂冲击超硬质膜,测定入射粒子量与膜剥离之间的定量关系,确定造成底材开始显露所需的粒子用量(孕育剂量)和冲蚀坑中心部位的膜全部剥离时的最低粒子用量(临界剂量),并以两者之差作为判据,收到了与划痕法通过临界载荷评价膜-底材结合强度的同样效果。试验结果证明,孕育剂量与膜厚呈正变关系,因而通过它可以先求出膜厚,再求出剥离单位厚度膜层所消耗的粒子量(线冲蚀系数),并用其作为膜-底材结合强度的判据,可以扣除膜厚的影响。作者认为,冲蚀法的主要优点是设备简单、操作方便、取样面积大、代表性好,能为各类薄膜工艺提供可信的判据。
The authors used 80 ~ # and 100 ~ # corundum sand with an incident speed of 40 m / s to impact the superhard film to determine the quantitative relationship between the amount of incident particles and the film peel, and to determine the amount of particles required to cause the substrate to begin to show And the minimum amount of particles (critical dose) at the time of film stripping at the central part of the erosion pit, and the difference between the two was taken as the criterion for the evaluation of the film-substrate bond strength The same effect. The test results show that the inoculation dose has a positive relationship with the film thickness, so the film thickness can be obtained first, and then the amount of particles consumed by the thickness of the peeling unit film (line erosion coefficient) can be obtained, and used as the film-substrate The combination of strength criteria, you can deduct the impact of film thickness. The author believes that the main advantages of the erosion method is the simple equipment, easy operation, large sample area, good representative, and can provide credible criteria for all kinds of thin film process.