对投影型微光学编码器的原理进行了分析 ,结合微机电系统集成技术 ,提出并实现了投影型微光学编码器。它是利用微机电系统集成技术将标尺光栅、指示光栅、光电二极管集成化构成投影型光栅微编码器。它具有体积小、光路调整容易的特点。实验结果表明 ,利用微细加工制作微光学编码器是完全可行的。该器件较之传统的光学编码器在经济性及小型化等方面具有非常明显的优势 The principle of the projection type micro optical encoder is analyzed. Combined with the MEMS integration technology, a projection type micro optical encoder is proposed and implemented. It is the use of micro-electromechanical systems integration technology will scale grating, indicating grating, photodiode integrated projection grating micro-encoder. It has a small size, light path adjustment easy features. Experimental results show that the use of micro-fabrication of micro-optical encoder is entirely feasible. The device has a significant advantage over traditional optical encoders in economy and miniaturization