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套刻精度是衡量分步重复投影光刻机的一项重要指标。套刻精度不仅取决于对准系统的对准精度，还受环境、工艺等因素的影响。提出了提高光刻机整机套刻精度的几种软件修正处理方法，通过工艺实验和考核，取得了比较满意的结果，证明了这些方法的可行性。
Overlay accuracy is a measure of step by step projection lithography an important indicator. Not only depends on the accuracy of alignment system alignment accuracy, but also by the environment, technology and other factors. Several software correction methods are proposed to improve the accuracy of overlay lithography machine. Through the process experiment and evaluation, the satisfactory results are obtained, and the feasibility of these methods is proved.