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激光诱导扩散中曝光区的大小在10μm数量级，其温度分布的测量是比较困难的．该文报道一种曝光区中极微小面元温度的不接触测量．文中介绍了测量原理、实验装置，给出了实验结果，并特地介绍了测量系统的定标．
The size of the exposed area in laser-induced diffusion is on the order of 10 μm, and the measurement of temperature distribution is more difficult. This paper reports a non-contact measurement of the temperature of very small facets in an exposed area. In this paper, the measurement principle and experimental device are introduced, the experimental results are given, and the calibration of the measuring system is introduced.