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根据相律探索出相平衡形成母液法生长碲镉汞液相外延膜新的工艺方法。该方法工艺简单,外延膜组份易于调整和控制。利用此种方法,成功地生长出x = 0-21 ~0-23,表面光亮,结构完整的碲镉汞液相外延膜。
According to the phase law to explore the phase equilibrium formation of the mother liquor method of mercury cadmium telluride liquid phase epitaxial film a new process. The method has simple process and the epitaxial film component is easy to adjust and control. With this method, the liquid crystal phase epitaxial HgCdTe film with x = 0-21 ~ 0-23 is successfully grown and has a bright surface and a complete structure.