Study of doping uniformity of a 200 kV ion implanter by RBS and sheet resistance measurements

来源 :核技术：英文版 | 被引量 : 0次 | 上传用户：gusano1987

【摘要】

：

The ion implantation uniformity is of vital importance for an ion implanter.In this paper,we report the,uniformity measurement for a large current ion implanter

【作者】

：

Li Hui Wang Ze-Song Zhang S

【机构】

：

WuhanUniv,WuhanUniv,AcadSciUzbek

【出处】

：

核技术：英文版

【发表日期】

：

2016年3期

【关键词】

：

均匀性测量离子注入机薄层电阻掺杂分布 RBS 卢瑟福背散射离子注入系统剂量评价 Ion implanter Rutherford backscatte

【基金项目】

：

supported by the National Natural Science Foundation of China(Nos.11405117 and 11205116),,International Cooperation Program of the Ministry of Science and Technology of China(No.2015DFR00720)

下载到本地 , 更方便阅读

下载此文赞助VIP

声明 : 本文档内容版权归属内容提供方 , 如果您对本文有版权争议 , 可与客服联系进行内容授权或下架

论文部分内容阅读

The ion implantation uniformity is of vital importance for an ion implanter.In this paper,we report the,uniformity measurement for a large current ion implanter(LC-16 type) by implanting of 190-keV Ar ions into Si to 3×1016 atoms/cm2,followed by Ruth

其他文献

Experimental study of the 9Li breakup reaction on Pb target

The breakup reaction of 9Li on a Pb target has been measured at 32.7 MeV/nucleon for the first time. Two peaks of 6He t t coincident fragments at 9.8 and 12.5 M

期刊

BREAKUPreactionNUCLEARCLUSTERSTATESINVARIANTmassmethod

Growth in solution of hooked Ni–Fe fibers by oriented rotation and attachment approaches

Inspired by the curved branches of fractal trees, hooked Ni–Fe fibers were grown in situ in Ni–Fe composite coatings on a spheroidal graphite cast iron substr

期刊

铁纤维镍镀层生长附着旋转纳米结构磨损试验复合涂层metal fiber fiber growth oriented attachments

Numerical and experimental analysis of AC loss for CFETR CS model coil

中央螺线管(CS ) 是中国熔化工程测试反应堆的一个重要部件，为生产，形成并且稳定在超导的 tokamak 的血浆。设计并且生产大超导的 CS 磁铁是一个复杂工作，因此设计中央螺线管模

期刊

CS模型线圈交流损耗实验堆数值分析托卡马克等离子体磁铁设计NB3SN聚变工程CFETR CS model coil AC loss Expe

Calculating the thermal properties of 93,94,95Mo using the BCS model with an average value gap param

标准英国计算机学会模型的差距参数被修改 Ginzburg 四轮马车理论的顺序参数代替。用的 BCS 模型，精力，熵，和热能力的这种新形式(^{ 93,94,95 }) 瞬间原子核被计算。结果与试

期刊

BCS模型模型参数计算热性能平均值金兹堡-朗道理论差距实验数据BCS Ginzburg-Landau Statisticalfluctu

Development of carbon composite iron ore micropellets by using the microfines of iron ore and carbon

熨矿石 microfines 并且专注很在 sintering 过程限制了使用。他们在 pelletization 被使用；然而，这个过程被花费集中。而且，焦炭得非的煤的 microfines 和另外的忍受碳的材料，例

期刊

碳纤维复合材料含碳材料铁矿石微丸炼铁高炉瓦斯灰烧结过程炼焦煤ironmaking microfines non-coking coal i

Graphene-reinforced aluminum matrix composites prepared by spark plasma sintering

期刊

铝基复合材料放电等离子烧结石墨制备铝合金复合材料力学性能性能恶化抗压强度metal matrix composites spark plasma

Reduction behavior of hematite in the presence of coke

The reduction kinetics of hematite in the presence of coke as a reductant was studied via isothermal and non-isothermal thermodynamic analyses. The isothermal r

期刊

还原行为赤铁矿焦炭非等温结晶加热速率表观活化能温度范围指前因子hematite ore reduction reduction kinetics

Monte Carlo study on abnormal growth of Goss grains in Fe-3%Si steel induced by second-phase particl

穿秒阶段粒子(AlN 和 MnS ) 导致的 Fe-3%Si (等级 Hi-B ) 的磁性的表的高斯谷物的选择反常生长用一个修改蒙特卡罗 Potts 模型被学习。为模拟的开始的微观结构从取向成像重

期刊

第二相粒子异常生长蒙特卡洛电子背散射衍射初始结构仿真结果颗粒边界生长异常silicon steel grain growth second

Response of multi-step compound pre-equilibrium reaction cross sections for the （p, n） reactions to

In furtherance to improving agreement between calculated and experimental nuclear data, the nuclear reaction code GAMME was used to calculate the multistep comp

期刊

反应截面光学势参数预平衡模型参数多步复合相互作用强度实验数据Proton-neutron interaction Multi-stepcom

Natural orbital description of the halo nucleus 6He

Ab initio calculations of nuclei face the challenge of simultaneously describing the strong short-range internucleon correlations and the long-range properties

期刊

NEUTRONHALONUCLEUS6HeNUCLEARstructureNUCLEARtheory

Study of doping uniformity of a 200 kV ion implanter by RBS and sheet resistance measurements

与本文相关的学术论文