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介绍一种新颖的超小型多倍频程5位GaAs MMIC数字移相器的设计、制造和性能。电路拓扑特定选择工艺参数变化对电性能影响最小的方案,22.5°和11.25°相移位采用共享一个兰格耦合器的电路拓扑,在5GHz～20GHz频率范围内,获得低峰值相移误差≤5°对180°、90°、45°相移位,≤2.5°对22.5°和11.25°相移位;低输入/输出驻波比≤1.8;低插入损耗起伏(1OdB±0.8dB)和小芯片尺寸(4.2mm×2.5mm×0.1mm)。
Describe the design, manufacture and performance of a novel subminiature multi-octave 5-bit GaAs MMIC digital phase shifter. Circuit Topology The specific choice of process parameters to minimize the impact on the electrical performance of the program, 22.5 ° and 11.25 ° phase shift sharing a Lange coupler circuit topology in the frequency range of 5GHz ~ 20GHz, low peak phase shift error ≤ 5 ° for phase shift of 180 °, 90 °, 45 °, ≤2.5 ° for phase shift of 22.5 ° and 11.25 °; low input / output VSWR ≤1.8; low insertion loss fluctuation (1OdB ± 0.8dB) Size (4.2 mm × 2.5 mm × 0.1 mm).