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用Nb-752薄长条做衬底材料,按C_2H_2/N_2分别为3/2和2/3两种气体流量比获得Ti(CN)_(3/2)和Ti(CN)_(2/3)两种涂层,由单面镀膜样品弯曲的曲率半径计算出涂层的宏观残余应力约为2—3GPa,其中热应力占10—20%,涂层与基材界面处应力状态分析表明,界面存在一剪切残留应力并计算大小为0.1—0.2GPa。此外,采用应力圆法分析涂层受力状态,讨论了涂层受外载作用下的破坏方式。
Ti (CN) _ (3/2) and Ti (CN) _ (2/2) were obtained by using Nb-752 thin strip as substrate material and C_2H_2 / N_2 gas flow rates of 3/2 and 2/3 respectively. 3) The two coatings, calculated from the radius of curvature of the single-sided coating sample, calculated the macroscopic residual stress of the coating to be about 2-3 GPa, of which the thermal stress accounted for 10-20%. The stress state analysis at the interface between the coating and the substrate , There is a shear residual stress in the interface and the calculated size is 0.1-0.2GPa. In addition, the stress circle method is used to analyze the stress state of the coating, and the failure mode of the coating under the external load is discussed.