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采用直流与射频共溅射技术制备Zr1-xSixN纳米涂层。通过改变Si靶溅射功率控制涂层中Si含量,研究了不同Si含量对Zr1-xSixN涂层的物相结构、晶粒尺寸、硬度和摩擦磨损性能的影响,探索了Zr1-xSixN纳米涂层的致硬机理。结果表明:Si的掺入影响Zr1-xSixN涂层的择优取向和相结构,随着Zr1-xSixN涂层中Si含量的增加,涂层截面的形貌由柱状晶转变为非柱状等轴晶,其结构的变化为:固溶体→nc-ZrN/α-Si3N4结构→非晶结构。涂层的晶粒尺寸在12～30nm之间。对于Si含量低于3.14%(摩尔分数)的Zr1-xSixN涂层,由于固溶强化作用使硬度随Si含量增加而增大,对于Si含量高于3.14%的Zr1-xSixN涂层,通过晶粒的转动和原子在晶界的移动能产生塑性形变,提高了涂层塑性形变能力,使得硬度下降。Zr1-xSixN涂层的耐磨损性能随Si含量的增加而增强。
Zr1-xSixN nano-coating was prepared by direct current and RF co-sputtering technology. The effect of different Si contents on the phase structure, grain size, hardness and friction and wear properties of Zr1-xSixN coatings was investigated by changing the Si sputtering power by Si target sputtering power. The hard mechanism. The results show that: Si doping affects the preferred orientation and phase structure of Zr1-xSixN coatings. With the increase of Si content in Zr1-xSixN coatings, the morphology of coating cross-section changes from columnar to non-columnar equiaxed, The structural changes are: solid solution → nc-ZrN / α-Si3N4 → amorphous structure. The grain size of the coating is between 12 and 30 nm. For the Zr1-xSixN coating with Si content below 3.14% (mole fraction), the hardness increased with increasing Si content due to solid solution strengthening and for the Zr1-xSixN coating with Si content above 3.14% Of the rotation and movement of atoms in the grain boundary can produce plastic deformation, increased plastic deformation ability of the coating, making the hardness decreased. The wear resistance of Zr1-xSixN coatings increases with increasing Si content.