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根据航天器表面测温的需要,研制了一种K型(NiCr-NiSi)薄膜热电偶。该型热电偶采用射频磁控溅射技术在针型高温陶瓷基体上制备薄膜热电偶,其热电偶结点厚度为微米级,能够与航天器表面有效贴合,实现航天器表面的瞬态高温测量。通过物理试验验证,该型薄膜热电偶测量最高温度能够达到800℃,测量相对误差在±0.5%以内,满足返回式航天器表面高温的瞬态测温需求。
According to the needs of spacecraft surface temperature measurement, a K type (NiCr-NiSi) thin film thermocouple was developed. This type of thermocouple adopts RF magnetron sputtering technology to prepare thin-film thermocouple on the pin-type high-temperature ceramic substrate. The thickness of the thermocouple junction is micrometer, which can effectively fit with the surface of the spacecraft to realize transient high temperature on the surface of the spacecraft measuring. The physical test shows that the maximum temperature of this type of thin film thermocouple can reach 800 ℃ and the relative error of measurement is within ± 0.5%, which meets the transient temperature requirement of high temperature on the surface of return spacecraft.