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本文提出了替代压缩式真空计测量容积式真空泵极限真空度的必要条件 ,并研制一种新颖的能完全替代压缩式真空计的测试仪器以及相关的装置和测试方法
In this paper, the necessary conditions for measuring the ultimate vacuum of a positive displacement vacuum pump instead of a compression type vacuum gauge are proposed, and a novel test apparatus which can completely replace the compression type vacuum gauge and a related device and test method are developed