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ＣＶＤ成膜技术（东芝）茨木伸树森一成１ＴＦＴ制备的关键工艺作为有源矩阵液晶显示的开关元件，从工作原理来看，薄膜晶体管（ＴＦＴ）是最好的。用来形成ＴＦＴ沟道的半导体活性层和栅绝缘膜的化学气相淀积（ＣＶＤ）技术，对器件性能来说的确是关键工艺。半导体活性层...
CVD Film Forming Technology (Toshiba) Takashi Sugimoto Hisamitsu 1TFT Key Processes of Preparation As the active matrix liquid crystal display switching element, the working principle of view, the thin film transistor (TFT) is the best. The chemical vapor deposition (CVD) technique used to form the semiconductor active layer and gate insulating film of a TFT channel is indeed a critical process for device performance. Semiconductor active layer ...