为研究低能电子能谱,建造了积分型平面栅网减速谱仪模型。减速栅网采用丝径86μm,丝距430μm的双层电成形铜网,用双层栅结构有效地屏蔽掉减速区电场的“渗透”。在源-减速栅间采用筒状均场环结构,使在距边界大于1 cm的减速区电场维持 In order to study low-energy electron spectroscopy, an integral planar grid deceleration spectrometer model was constructed. The decelerating grid adopts a double-layer electroforming copper mesh with a wire diameter of 86μm and a pitch of 430μm, and effectively shields the “infiltration” of the electric field in the decelerating area with a double-layered grid structure. In the source - deceleration grid between the use of uniform field ring structure, the deceleration zone in the distance from the boundary of more than 1 cm to maintain the electric field