硅扩散型压力传感器件自70年代问世以来,由于它有诸多优点,受到许多技术先进国家的重视.本文着重介绍作者所做的工作,即扩散型压力敏感元器件的特点、压力效应、圆片应力分析、制造的关键工艺和敏感元器件的结构设计及其应用,并提出对今后研究发展的见解. Since the advent of the silicon diffused pressure sensor since the 1970s, it has attracted the attention of many technologically advanced countries due to its many advantages.This article focuses on the work done by the author, namely, the characteristics of diffusion-type pressure-sensitive components, pressure effects, Stress analysis, the key manufacturing process and the structural design of sensitive components and their applications, and put forward the views on future research and development.