目前,国际上通用两种方式制备α-siPIN太阳电池,即单反应室和分离反应室。前者由于设备简单,仍受到人们的相当重视。过去,我们在单反应室里制作的PIN太阳电池,其转换效率一直徘徊在4.2%。后来,我们对反应室的进气排气系统,基片安放及加热方式等做了改进,并采取措施减少系统的污染。在经过数百次单项试验和根据器件物理的要求对制备参量进行优选的基础上,使单反应室制作的非晶硅PIN电池的转换效率提高到7.9%。 Currently, there are two common ways to prepare α-siPIN solar cells in the world, that is, single reaction chamber and separation reaction chamber. The former due to the simple equipment, people still receive considerable attention. In the past, the PIN solar cells we made in our single-cell lab had been hovering at 4.2%. Later, we made improvements to the intake and exhaust systems of the reaction chamber, substrate placement and heating methods, and took measures to reduce the pollution of the system. The conversion efficiency of amorphous silicon PIN cells fabricated in a single chamber was raised to 7.9% after several hundred individual experiments and optimization of the preparation parameters based on the physical requirements of the device.