论文部分内容阅读
Effects of Annealing Temperature on the Properties of Copper Films Prepared by Magnetron Sputtering
【机 构】
：
College of Materials Science and Engineering, Taiyuan University of Technology, Taiyuan 030024, Chin
【出 处】
：
武汉理工大学学报（材料科学版）（英文版）
【发表日期】
：
2015年1期
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