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该文介绍了用场发射阵列作为电子源的纵向磁敏感传感器(VerticalFieldEmissionArraysMasneticFieldSensor-VFEAMFS)的工作原理,分析了这种磁敏传感器的灵敏度,并阐述了VFEAMFS器件的制造和实验结果以及器件的基本工作参数和提高灵敏度的主要措施。
This paper introduces the working principle of Vertical Field Emission Arrays Magnetic Field Sensor-VFEAMFS using the field emission array as an electron source, analyzes the sensitivity of the magnetic sensor, and elaborates the fabrication and experimental results of the VFEAMFS device and the basic working parameters of the device And improve the sensitivity of the main measures.