建立了膜-基界面结合强度的红外激光准静态划痕的检测新方法。采用红外激光对膜层样品进行连续划痕,通过摄像机,获得膜-基界面的划痕图像,经过Matlab预处理后准备调用;同时采用红外热像仪实时在线检测样品表面的受热状态。信号检测系统检测薄膜表面温度和划痕图像等参数,返回信号处理系统进行分析和处理。从而实现对膜-基界面结合强度的检测。 A new method of detecting the quasi-static scratches of infrared laser with film-substrate interfacial bonding was established. The film samples were continuously scratched by infrared laser. The scratched images of the film-base interface were obtained by the camera. After being pre-processed by Matlab, the samples were prepared for transfer. At the same time, the thermal state of the sample surface was detected by the thermal imaging camera in real time. Signal detection system detects the film surface temperature and scratch images and other parameters, return to the signal processing system for analysis and processing. In order to achieve the film - based interface bonding strength detection.