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利用纳米测量机(NMM)和原子力显微镜(AFM)实现了高精度的台阶高度评价,该系统的测量范围可以达到25 mm×25 mm×5 mm。文中描述了NMM和AFM的工作原理,说明了NMM的高精度定位性能,系统利用NMM实现x、y方向的扫描,AFM测头只是作为零点传感器,通过将AFM的悬臂梁反馈控制信号引入到NMM的数字信号控制器中,NMM实现在z方向的辅助测量,这种测量模式减小了AFM的PZT扫描器固有特性对测量的影响。根据ISO 5436—1:2000的评价方法对经过标定的台阶高度进行评价,14次测量的标准偏差为0.52 nm。
Highly accurate step height evaluation with nanometer measuring machine (NMM) and atomic force microscope (AFM), the measuring range of the system can reach 25 mm × 25 mm × 5 mm. This paper describes the working principle of NMM and AFM, describes the high-precision positioning performance of NMM, the system uses NMM to achieve x, y direction of the scan, AFM probe only as a zero sensor by AFM cantilever beam feedback control signal into the NMM Of the digital signal controller, the NMM implements an auxiliary measurement in the z-direction that reduces the effect of the inherent characteristics of the PZT scanner on the AFM measurement. The calibrated step height was evaluated according to the evaluation method of ISO 5436-1: 2000 with a standard deviation of 0.52 nm for 14 measurements.