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以乙炔为碳源气体,采用化学气相沉积的方法,在不同表面粗糙度的基体上制备出疏松热解炭,利用图像法测定了疏松热解炭的密度,用场发射扫描电镜检测了疏松热解炭的微观结构,研究了基体表面粗糙度对疏松热解炭密度的影响。结果表明:疏松热解炭密度随着表面粗糙度的增大而增加;反应刚开始时,表面成核生长机制起主导作用,随着反应的进行,生长机制变成了气相成核沉积起主导作用。
Using acetylene as carbon source gas, using the method of chemical vapor deposition to prepare loose pyrolytic carbon on the substrate with different surface roughness, using the image method to determine the density of the loose pyrolytic carbon, using field emission scanning electron microscopy to detect the loose pyrolysis The microstructure of carbon was investigated. The effect of substrate surface roughness on the density of unconsolidated pyrolytic carbon was studied. The results show that the density of loose pyrolytic carbon increases with the increasing of surface roughness. At the beginning of the reaction, the surface nucleation and growth mechanism plays a leading role. As the reaction progresses, the growth mechanism becomes dominated by gaseous nucleation and deposition effect.