In-plane load measuring technique for the strength test of MEMS micro-cantilever

来源 :Chinese Science Bulletin | 被引量 : 0次 | 上传用户:ytfonrt
下载到本地 , 更方便阅读
声明 : 本文档内容版权归属内容提供方 , 如果您对本文有版权争议 , 可与客服联系进行内容授权或下架
论文部分内容阅读
An in-plane load measuring technique is developed to perform the strength test of the micro-cantilever. Based on electromagnetism theorem, Micro UTM (Universal Testing Machine) was in-house made with the load range ±1 N and the displacement range ±300 μm. It applies an in-plane load on the free-end of the micro-cantilever. The load acts as a bending moment for the root of the cantilever, but as a torque for the anchor. The results show that for samples with different sizes the ultimate loads range from 1.3 to 69.8 mN and the calculated torque is ap-proximately proportional to the square of the bonding length. Two failure modes, fracture at the root of the cantilever and fracture at the anchor, are observed by micro examination to the debris, which indicates that there is a critical design to achieve the strength bal-ance between the cantilever and the anchor. The work demonstrates that Micro UTM is a powerful in-strument for the strength test of the micro-cantilever and similar micro-structures. Based on electromagnetism theorem, Micro UTM (Universal Testing Machine) was in-house made with the load range ± 1 N and the displacement range ± 300 μm. It applies an in-plane load on the free-end of the micro-cantilever. The load acts as a bending moment for the root of the cantilever, but as a torque for the anchor. The results show that for samples with different sizes the ultimate loads range from 1.3 to 69.8 mN and the calculated torque is ap-proximately proportional to the square of the bonding length. Two failure modes, fracture at the root of the cantilever and fracture at the anchor, are observed by micro examination to the debris, which indicates that there is a critical design to achieve the strength bal-ance between the cantilever and the anchor. The work demonstrates that Micro UTM is a powerful in-strument for the strength test of the micro-cantilever and similar micr o-structures.
其他文献
女书是世界上现存的唯一女性专用文字,主要流传于湖南江永。二十世纪80年代女书被外界发现后,大量专家学者进行田野调查,积极对女书文献进行搜集整理。本文主要分析女书文献
魔术在中国原被称为幻术,民间俗称变戏法。魔术在中国兴起较早,有着悠久的发展历史,但在后期发展过程中发生了间断,直到100多年前西方魔术传入,中国魔术才开始继续发展。但由
MicroRNAs (miRNAs) are widely expressed in organisms and are implicated in the regulation of most biological functions.The present study investigated the associ
We have recently developed an enzyme-directed immunostimulant (EDI) prodrug motif,which is metabolized to active immunostimulant by cancer cells and,following d
同种植物在不同地区、不同场合受自然因素或人文因素的影响所赋予的人文内涵也有很明显的差异性。我们需要了解这些丰富的人文内涵,才能够更透彻的了解植物,更好的运用植物来
麦秸是小麦收获后留在田里的麦草,含有丰富的矿质元素,是宝贵的自然资源。麦秸直接还田已成为秸秆综合利用最直接、最经济的重要技术途径,在生产上已经广泛利用,能够增产培肥,然而麦秸还田后可能存在使机插水稻植株形成僵苗、降低有效穗数等问题。适宜的水分管理对机插水稻生产尤为重要,适当的水分管理有利于物质的同化积累、改善群体质量、增加有效穗数,最终增加产量。因此,麦秸还田和水分管理对促进机插水稻实现“高产、优
1田兰不过和杨敏争了几句嘴,就被丈夫叫到新盖起来不久的上屋里,足足骂了有三个钟头。一帮儿女站在尚没有平整好的院子里听着,谁都不敢进去为母亲申辩。杨宇的骂声不绝于耳,
Norditerpenoids and dinorditerpenoids represent diterpenoids widely distributed in the genus Podocarpus with notable chemical structures and biological activiti
Varacin C is a promising anticancer agent and possesses acid-promoted and photo-induced DNA-damaging activities.In this study,we synthesized an analog varacin-1
Peripheral nerve injury (PNI),one of the most common concerns following trauma,can result in a significant loss of sensory or motor function.Restoration of the