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为发展金属离子束材料表面改性技术的工业应用，北师大低能核物理所研制成阴极真空弧离子源和离子注入装置．简要介绍该设备的结构、原理和性能．
In order to develop the industrial application of the surface modification technology of metal ion beam materials, the cathode vacuum arc ion source and the ion implantation device have been developed by the North China Normal University Low Energy Nuclear Physics. Briefly introduce the structure, principle and performance of the device.