论文部分内容阅读
与矩形槽和正弦槽光栅相比,锯齿槽光栅具有高的衍射效率,可采用全息离子束刻蚀和单点金刚石车削两种方法制造。首先,介绍了这两种方法的制造误差。然后,分析了这些制造误差对用于可见近红外和长波红外成像光谱仪的光栅衍射效率的影响,指出闪耀角误差、槽顶角误差和刻刀圆弧半径是影响锯齿槽光栅衍射效率的关键因素。为制作高质量成像光谱仪用光栅奠定了理论基础和指导。
Compared with the rectangular groove and the sine groove grating, sawtooth grating with high diffraction efficiency, can be used holographic ion beam etching and single-point diamond turning two ways to manufacture. First, the manufacturing errors of the two methods are introduced. Then, the influence of these manufacturing errors on the grating diffraction efficiency for visible near-infrared and long-wave infrared imaging spectrometers is analyzed. It is pointed out that the blaze angle error, the groove angle error and the radius of the burr arc are the key factors affecting the diffraction efficiency of the serrated grating . For the production of high quality imaging spectrometer grating laid the theoretical foundation and guidance.