本文叙述了一种大型钛薄膜吸附泵的抽速测试方法,介绍了实验原理及测试装置。实验表明,此方法用于测试薄膜吸附泵的抽速是可行的,测得的数据是可靠的。 This article describes a large titanium membrane adsorption pump pumping speed test method, introduced the experimental principle and test device. Experiments show that this method is suitable for testing the pumping speed of the membrane adsorption pump, and the measured data is reliable.