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对以316L不锈钢为本体、以Stellite 6合金为密封面激光堆焊层的核阀试样进行高温、大剂量的C+注入,测试分析了注入层的微区成分、C+浓度分布及其表面物相,测试了堆焊层受注前后面的表面粗糙度及显微硬度,并进行了摩擦磨损性能的对比研究。结果表明,高的靶温和大剂量共同产生的增强扩散作用以及表面溅射效应可使C+的注入深度提高2个数量级,且浓度呈准高斯状分布;位错强化、析出强化、固溶强化及碳化物的弥散强化作用提高了注入层的显微硬度,使注入层的抗磨损性能明显提高。
The high-temperature and high-dose C + implanted with 316L stainless steel as the main body and the laser valve with the Stellite 6 as the sealing surface were tested. The micro-composition, C + concentration distribution and the surface phase of the implanted layer The surface roughness and microhardness of the surfacing layer before and after injection were tested. The friction and wear properties were compared. The results show that the enhanced diffusion and the surface sputtering effect resulted from the combination of high target temperature and high dose can increase the injection depth of C + by two orders of magnitude and the distribution is quasi-Gaussian. The dislocation strengthening, precipitation strengthening, solution strengthening and The dispersion strengthening effect of carbides increases the microhardness of the implanted layer and significantly improves the wear resistance of the implanted layer.