具有良好机械和物理性能的硅(单晶)材料,正在逐渐成为大有发展前途的固体传感器材料。本文将综述硅材料的一些微细加工技术以及用这些方法制成的各类传感器的构造及其传感原理,此外还对硅微细加工的一个成功例子—集成型气体色谱分析系统作了简单介绍。 With good mechanical and physical properties of silicon (single crystal) materials, is gradually becoming a promising solid sensor materials. This article reviews some of the microfabrication techniques for silicon materials and the construction and sensing principles of the various types of sensors made using these methods. In addition, a brief introduction to the integrated gas chromatographic system, a successful example of silicon microfabrication, is presented.