“天光”装置是一套大型的高功率、高光束品质的ＫｒＦ准分子激光系统，采用以计算机为核心的自动测控系统，其软件结构示于图１，并具有如下功能。图１　测控系统软件结构示意图（１）提供友好的人机交互界面，操作人员可以通过界面了解装置的运行状态和实验进程输入数据控制 The “Skylight” device is a large, high power, high beam quality KrF excimer laser system that uses a computer-based automatic measurement and control system. The software architecture is shown in Figure 1 and has the following features. Figure 1 measurement and control system software structure diagram (1) to provide friendly man-machine interface, the operator can understand the operation of the device through the interface and the experimental process of input data control