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为进一步提升红外气体传感器的性能,提出了一种可实现辐射自增强的多层纳米交叠复合非晶碳薄膜材料应用于红外光源,对材料制备的关键工艺及性能表征进行了深入研究,以期大幅提高光源的辐射效率,降低功耗。采用非平衡磁控溅射工艺制备了含钛的周期性非晶碳复合薄膜,在不同退火条件下进行了方阻及光学吸收率测试表征。结果表明,多层纳米厚度交叠薄膜有效降低了薄膜的应力;氧等离子体表面刻蚀调控工艺实现了高辐射率纳米纤维材料的集成制备;制备的非晶碳纳米复合薄膜在高温800℃退火后呈现出良好的电阻热稳定性,在波长5~6μm内吸收率大于80%,最高接近84%。本工作为该辐射自增强的非晶碳薄膜应用于MEMS红外光源提供了一定的技术支持。
In order to further improve the performance of infrared gas sensors, a multi-layer nanocomposite amorphous carbon film material that can achieve self-enhancement of radiation was proposed for infrared light sources. The key techniques and performance characterization of materials were studied in depth Significantly improve the radiation efficiency of the light source, reducing power consumption. Titanium-containing periodic amorphous carbon composite films were prepared by unbalanced magnetron sputtering. The square resistance and optical absorptivity were characterized under different annealing conditions. The results show that the multilayer thin film with nanometer thickness can effectively reduce the stress of the thin film. The etching process of oxygen plasma surface can achieve the integrated preparation of the high emissivity nanofiber material. The prepared amorphous carbon nanocomposite film is annealed at 800 ℃ After showing good resistance to thermal stability, in the wavelength of 5 ~ 6μm absorption rate of more than 80%, up to nearly 84%. This work for the radiation self-reinforced amorphous carbon film used in MEMS infrared light source provides a certain degree of technical support.