论文部分内容阅读
本文采用自蔓燃高温合成方法(Self-propagating High-temperature Synthesis)简称(SHS)合成氮化硅粉体,借助于XRD、SEM等检测方法,分析了自蔓燃高温合成氮化硅过程中氮气、温度、稀释剂与孔隙率等方面的影响。结果表明:只要最高燃烧温度不高于相应氮气压力下Si3N4的热分解温度,就可以用SHS方法合成Si3N4;氮气压力下硅粉的自蔓燃合成反应,必须要引入Si3N4稀释剂,来控制反应温度,以获得高α相含量的粉体。压坯气孔率控制在30%~70%,否则反应不能进行。研究发现SHS法可以制备纯度较高的氮化硅粉体。此法较传统方法合成的氮化硅设备简单,成本低廉,纯度高,填充性及烧结活性好。
In this paper, self-propagating high-temperature synthesis (SHS) synthesis of silicon nitride powder, by means of XRD, SEM and other detection methods, analysis of self-propagating high temperature synthesis of silicon nitride process of nitrogen , Temperature, diluent and porosity. The results show that Si3N4 can be synthesized by SHS method as long as the maximum combustion temperature is not higher than the thermal decomposition temperature of Si3N4 under the corresponding nitrogen pressure. Si3N4 thinner must be introduced to control the reaction Temperature, to obtain a high content of α-phase powder. Compacted porosity control in 30% to 70%, otherwise the reaction can not be carried out. The study found that SHS method can prepare high purity silicon nitride powder. This method is more simple than the traditional method of silicon nitride equipment, low cost, high purity, filling and sintering activity.