激光微熔覆制备SnO_2气敏膜及其性能研究

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以纳米氧化锡(SnO2)粉末为原料,有机溶剂为载体,配置了SnO2浆料,通过激光微熔覆技术在氧化铝基板上制备了SnO2气敏膜。采用X射线衍射(XRD)和场发射扫描式电子显微镜(FE-SEM)分析研究了激光功率对SnO2气敏膜微观结构和气敏特性的影响规律。实验表明,随着激光功率的升高,纳米SnO2的晶粒逐渐长大,气敏膜对乙醇气体的灵敏度逐渐降低;激光微熔覆制备的气敏膜对体积分数为2×10-3乙醇气体的灵敏度最高达到8.6,与传统丝网印刷工艺制备的气敏膜性能相当。 SnO2 gas-sensitive membrane was prepared on alumina substrate by laser micro-cladding technique using SnO2 powder as raw material and organic solvent as carrier. The influence of laser power on the microstructure and gas-sensing properties of SnO2 gas sensing films was investigated by X-ray diffraction (XRD) and field emission scanning electron microscopy (FE-SEM). The experimental results show that with the increase of laser power, the grain size of nanometer SnO2 gradually increases, and the sensitivity of gas sensing film to ethanol gas decreases gradually. The gas sensitive film prepared by laser micro-cladding has a good effect on the volume fraction of 2 × 10-3 ethanol Gas sensitivity up to 8.6, with the traditional screen printing process prepared gas-sensitive film performance quite.
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