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将等离子增强非平衡磁控溅射物理气相沉积(PEUMS-PVD)和电子回旋共振-微波等离子体增强化学气相沉积(MW-ECRPECVD)技术相结合,通过制备不同的过渡层,在铜基上成功地制备了类金刚石膜.拉曼光谱分析表明,所制备的碳膜具有典型的类金刚石结构特征.检测结果表明,随着沉积偏压的增大,D峰和G峰均向高波数漂移,ID/IG值增大,表面粗糙度减小,而平均硬度和弹性模量呈先增大后减小的趋势.
The combination of PEUMS-PVD and MW-ECRPEC (MW-ECRPECVD) technique was used to fabricate different transitional layers to achieve copper-based success Diamond films were prepared by Raman spectroscopy.The results show that the prepared carbon films have the typical DLC characteristics.The results show that the D and G peaks shift to high wave numbers with the increase of deposition bias, The value of ID / IG increases, the surface roughness decreases, while the average hardness and elastic modulus increase first and then decrease.