在以平板为测量基准平面的平台测量技术中,往往遇到这样的情形:平板精度不够,或者即使最高级别也不能满足测量要求。就自然的想到这样一种办法,将平板划分为若干区域,用其中的一个误差足够小,区域足够大的位置,作为测量时用来排除被测件基准表面形状误差的理想区域,借以提高测试 Platform measurement techniques that use a flatbed as a reference plane often encounter situations where flatness is not sufficient, or even the highest level does not meet the measurement requirements. It is natural to think of such a way that the tablet is divided into a number of regions, one of which is small enough to have a sufficiently large area to be used as an ideal region for excluding the shape error of the reference surface of the device under test in order to improve the test