Conducting all-in-one etch process for 3D-NAND fabrication requires close etch rate(E/R)for SiO2 and Si3N4;however,to attain comparable and high etch rate for b
Micro-sieves have been widely used in medical treatment,quarantine,environment,agriculture,pharmacy and food processing.However,the manufacturing and yield impr
This paper proposed a flexible pressure sensor based on poly(dimethylsiloxane) nanostructures film and report an efficient,simple,and low-cost fabrication strat