3D-NAND 相关硕士博士期刊学术论文 - 搜论网

3D-NAND相关论文

Silicon Nitride Etch via Oxidation Reaction in Fluorocarbon/Oxygen Plasma:A First-Principle Study

Conducting all-in-one etch process for 3D-NAND fabrication requires close etch rate(E/R)for SiO2 and Si3N4;however,to at......

期刊

3D-NAND oxide NITRIDE OXYNITRIDE plasma ETCH FIRST-PRINCIPLE

Nitridation-Etch of Silicon Oxide in Fluorocarbon/Nitrogen Plasma:A Computational Study

The continually increasing number of silicon oxide(SiO2)and nitride(Si3N4)layers in 3D-NAND offers both motivations and ......

期刊

3D-NAND oxide NITRIDE OXYNITRIDE plasma ETCH molecular dynamics quantum chemistr

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