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前言在固体表面传输的声表面波于1895年为瑞利所发现,并在十几年前在电子学领域获得了应用。在压电体表面设置梳状叉指电极(称为叉指换能器,可简写为IDT),能够高效率地发生和检出表面波。这种叉指电极结构采用了随半导体集成电路技术而发展起来的光刻技术,是在平面型表面电子学时代
Surface acoustic waves propagating on solid surfaces were discovered by Rayleigh in 1895 and have been used in electronics more than a decade ago. Comb-finger electrodes (called interdigital transducers, abbreviated as IDTs) are provided on the surface of the piezoelectric body to generate and detect surface waves with high efficiency. This kind of interdigital electrode structure adopts the lithography technology that has developed with the semiconductor integrated circuit technology, is in the plane type surface electron age