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研制了无前单色器Seemann-Bohlin掠射聚焦装置,并对Seemann-Bohlin法的衍射强度公式进行了讨论.计算表明:1.此装置测定表面层及薄膜的衍射强度约为普通衍射仪法的7—20倍。用1kW的X射线源即可快速测得7nm金膜的2θ<120.的衍射线.2.厚样品的衍射强度也可达一般衍射仪法的3—20倍.实验证实了这个结果.
The Seemann-Bohlin glancing focusing device with no front monochromator is developed and the diffraction intensity formula of Seemann-Bohlin method is discussed. The calculation shows that: 1. The diffraction intensity of the surface layer and the film measured by this device is about the normal diffractometer 7-20 times. With 1kW X-ray source can be quickly measured 7nm gold film 2θ <120 diffraction lines .2 thick sample diffraction intensity of up to 3-20 times the general diffraction method. The experiment confirmed this result.