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设计了一种四螺旋悬臂梁-质量块结构的压电能量采集器,将环境振动能转换为电能.采用有限元分析软件(COMSOL Multiphysics)建立结构模型,仿真结构固有频率,计算不同振动频率下器件的位移、应力、应变和电势以及不同加速度下的电压输出,仿真得到结构的一阶谐振频率为102 Hz,为后期测试提供指导.利用溶胶-凝胶工艺完成锆钛酸铅(PZT)压电薄膜的制备,通过微电子机械系统(MEMS)工艺和引线键合工艺完成器件结构制造,将四个螺旋梁上的压电单元串联以实现输出最大化.性能测试结果表明:器件固有频率为110 Hz,输出电压随加速度的增大而线性增大,3g加速度下输出电压峰峰值为140 mV.“,”A piezoelectric power generator based on the four-helical cantilever beam-mass block was designed to convert environmental vibration energy into electrical energy.The finite element analysis software (COMSOL Multiphysics) was used to build the structural model,simulate the inherent frequency of the structure,calculate the displacement,stress,strain and potential of the device under different vibration frequencies and the output voltage under different accelerations.The simulation results show that the first-order resonant frequency of the structure is 102 Hz,providing a guidance for the later test.The PbZr0.s3 Ti0.47O3 (PZT) piezoelectric thin film was fabricated by the sol-gel method.The device structure was fabricated through the micro-electromechanical system (MEMS) process and wire bonding process.The piezoelectric elements on the four helical beams were connected in series to maximize the output.The performance test results show that the inherent frequency of the device is 110 Hz,the output voltage increases linearly with the increase of the acceleration,and the output voltage peak-to-peak value is 140 mV at 3g acceleration.