提出了四种特殊的测量方法,它们只是在测量步骤或配置方式上稍作改动,就可成倍地增测量深度,在要求的检测深度一定时,可由此提高测量灵敏度。用这些方法对同一只试件摄取了一系列莫尔等高图,最后比较了它们的优缺点。 Four special measurement methods are proposed. They only increase the measurement depth multiplied by a few changes in the measurement procedure or the configuration mode. When the required detection depth is constant, the measurement sensitivity can be improved. Using these methods, we took a series of Moiré contours on the same sample, and finally compared their advantages and disadvantages.