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以周期膜理论为基础 ,改进了已有的设计方法 ,采用随机数的方法在 1 8～ 2 0nm波段设计了积分反射率最大的宽带多层膜 ,理论上得到了高于周期膜系 8%的积分反射率 .同时给出了整体的设计步骤 ,并用磁控溅射方法对其进行了制备 .最后的X射线衍射测量和反射率的相对测试表明 ,与周期膜系相比 ,非周期多层膜的带宽展宽 ,反射率积分值增加 ,但峰值反射率略有降低 .膜厚变化的无规律性使得非周期多层膜的制备更加困难 ,进一步提高膜厚控制精度是今后实验的重点 .
Based on the periodic film theory, the existing design methods are improved. By using the random number method, a broadband multi-layer film with the highest integral reflectance is designed in the band of 18-20 nm, and the theoretical value is higher than 8% The integral reflectance is given.At the same time, the overall design procedure is given and the method is applied to magnetron sputtering.Finally, the relative X-ray diffraction measurement and the relative reflectance test show that compared with the periodic membrane system, The bandwidth of the film widened and the integral of reflectivity increased, but the peak reflectivity decreased slightly.The irregularity of the film thickness made the preparation of the non-periodic multi-layer film more difficult, and further improvement of film thickness control accuracy was the focus of future experiments.