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为精确测量普朗克常数h,实现能量天平法建立量子质量基准,提出了三轴双频激光外差干涉和折叠式Fabry-Perot(F-P)干涉绝对距离测量相结合的激光干涉测量方法,用于精密测量和定位能量天平装置中沿竖直方向在均匀磁场中运动的互感线圈位移。用三轴双频激光外差干涉精密测量运动线圈的质心位移和姿态,位移测量不确定度为10nm;进而将F-P腔干涉绝对距离测量与外差干涉测量结果进行比对和校准。仿真表明,采用本文方法,当位移测量范围约为30mm时,测量分辨率优于1nm。将该方法运用于真空中线圈位移测量,相对测量不确定度优于1.0×10-9。
In order to accurately measure the Planck’s constant h and establish the quantum mass benchmark based on the energy balance method, a laser interferometry method based on three-axis dual-frequency laser heterodyne interference and folded Fabry-Perot (FP) interference absolute distance measurement is proposed. Mutual inductance coil displacement in a vertical magnetic field moving in a precision measurement and positioning energy balance. The center-of-mass displacement and attitude of the moving coil are precisely measured with a three-axis dual-frequency laser heterodyne interferometer. The uncertainty of displacement measurement is 10 nm. Then, the absolute distance measurement of interferometric F-P cavity and the result of heterodyne interferometry are compared and calibrated. The simulation shows that the measurement resolution of this method is better than 1nm when the displacement measurement range is about 30mm. The method is applied to the displacement measurement of vacuum coil, the relative measurement uncertainty is better than 1.0 × 10-9.