论文部分内容阅读
恒力模式和恒高模式是原子力显微镜的两种主要操作模式.前一种模式通常用于成像在垂直方向变化大的表面,但仅对低空间频率表面有效.后一种模式仅对光滑表面在高分辨率高扫描速度下的成像有用.为克服这些缺点,提出了组合恒高和恒力的新操作模式.使用这个模式,表面形貌的低空间频率成分利用垂直压电扫描器及其控制信号跟踪并测量,高空间频率成分利用悬臂信号测量.然后,表面形貌图像利用组合低频和高频成分得到.仿真结果证明了这种新的操作模式具有高速和高分辨率的优点.
Constant force mode and constant height mode are the two main modes of operation of AFM.The former mode is commonly used to image surfaces that vary greatly in the vertical direction but only for low spatial frequency surfaces.The latter mode applies only to smooth surfaces In order to overcome these shortcomings, a new mode of operation combining constant height and constant force is proposed, in which the low spatial frequency components of the surface topography are measured using a vertical piezoelectric scanner and its control signals Tracking and measurement, the high spatial frequency components were measured using a cantilever signal, and the topography images were then combined using low and high frequency components.The simulation results demonstrate the advantages of this new operating mode with high speed and high resolution.