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航空发动机智能化及其他机械系统的智能化需要原位集成制造的传感器,为此研制了发动机涡轮叶片原位集成高温传感器。该高温传感器采用MEMS微制造工艺将厚度在微米量级的微小传感器原位集成在航空发动机涡轮叶片表面,利用微技术制造的传感器和标准的热电偶进行了一系列的高温测量试验和一系列细致的高温温度表征测量研究。该微制造工艺攻克了两项技术难关:曲表面的光刻技术和高温绝缘层的制作技术。涡轮叶片表面原位集成的微传感器不仅可以原位测量高达800℃的环境温度,并且具有很高的机械强度,可以承受高达40 g的振动和100 g的冲力。研究还表明,在高温测量环境下,高温测量精度和高温环境下的温度场(高温温度的空间分布与升温时间迟豫)密切相关。由于高温环境温度场的差异,可以产生高达10%的测量本征误差。
Aeroengine intelligence and other intelligent mechanical systems need in-situ integrated manufacturing sensors, developed for the engine turbine blades in situ integrated high temperature sensor. The high-temperature sensor MEMS micro-fabrication process will be a tiny thickness of micrometer-sized sensors in situ integrated in the aeroengine turbine blade surface, the use of micro-technology and standard thermocouple made a series of thermocouple test and a series of meticulous High Temperature Characterization Measurement Study. The micro-manufacturing process to overcome the two technical difficulties: curved surface lithography and high temperature insulation layer production technology. The in-situ integrated micro-sensor on the turbine blade surface not only measures ambient temperatures up to 800 ° C in situ, but also has high mechanical strength and can withstand up to 40 g of vibration and 100 g of momentum. The study also shows that in high temperature measurement environment, high temperature measurement accuracy and high temperature environment temperature field (high temperature temperature spatial distribution and heating time delay) are closely related. Due to the difference in temperature field at high temperature, up to 10% of the measured intrinsic error can be generated.